High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs

Capacitive micromachined ultrasonic transducers (CMUTs) with substrate-embedded springs offer highly efficient output pressure performance over conventional CMUTs, owing to their nonflexural parallel plate movement. The embedded silicon springs support thick Si piston plates, creating a large nonfle...

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Detalles Bibliográficos
Autores principales: Lee, Byung Chul, Nikoozadeh, Amin, Park, Kwan Kyu, Khuri-Yakub, Butrus T.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111897/
https://www.ncbi.nlm.nih.gov/pubmed/30072601
http://dx.doi.org/10.3390/s18082520

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111897/
https://www.ncbi.nlm.nih.gov/pubmed/30072601
http://dx.doi.org/10.3390/s18082520

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