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Adhesive-Free Bonding of Monolithic Sapphire for Pressure Sensing in Extreme Environments
This paper presents a monolithic sapphire pressure sensor that is constructed from two commercially available sapphire wafers through a combination of reactive-ion etching and wafer bonding. A Fabry–Perot (FP) cavity is sealed fully between the adhesive-free bonded sapphire wafers and thus acts as a...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111938/ https://www.ncbi.nlm.nih.gov/pubmed/30126159 http://dx.doi.org/10.3390/s18082712 |