Tunable Fabry-Perot Interferometer Designed for Far-Infrared Wavelength by Utilizing Electromagnetic Force

A tunable Fabry-Perot interferometer (TFPI)-type wavelength filter designed for the long-wavelength infrared (LWIR) region is fabricated using micro electro mechanical systems (MEMS) technology and the novel polydimethylsiloxane (PDMS) micro patterning technique. The structure of the proposed infrar...

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Detalles Bibliográficos
Autores principales: Jung, Dong Geon, Lee, Jun Yeop, Kim, Jae Keon, Jung, Daewoong, Kong, Seong Ho
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6112020/
https://www.ncbi.nlm.nih.gov/pubmed/30082620
http://dx.doi.org/10.3390/s18082572

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6112020/
https://www.ncbi.nlm.nih.gov/pubmed/30082620
http://dx.doi.org/10.3390/s18082572

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