Feasible Route for a Large Area Few-Layer MoS(2) with Magnetron Sputtering

In this article, we report continuous and large-area molybdenum disulfide (MoS(2)) growth on a SiO(2)/Si substrate by radio frequency magnetron sputtering (RFMS) combined with sulfurization. The MoS(2) film was synthesized using a two-step method. In the first step, a thin MoS(2) film was deposited...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhong, Wei, Deng, Sunbin, Wang, Kai, Li, Guijun, Li, Guoyuan, Chen, Rongsheng, Kwok, Hoi-Sing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6116247/
https://www.ncbi.nlm.nih.gov/pubmed/30081483
http://dx.doi.org/10.3390/nano8080590

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6116247/
https://www.ncbi.nlm.nih.gov/pubmed/30081483
http://dx.doi.org/10.3390/nano8080590

Ejemplares similares