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Feasible Route for a Large Area Few-Layer MoS(2) with Magnetron Sputtering

In this article, we report continuous and large-area molybdenum disulfide (MoS(2)) growth on a SiO(2)/Si substrate by radio frequency magnetron sputtering (RFMS) combined with sulfurization. The MoS(2) film was synthesized using a two-step method. In the first step, a thin MoS(2) film was deposited...

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Detalles Bibliográficos
Autores principales:	Zhong, Wei, Deng, Sunbin, Wang, Kai, Li, Guijun, Li, Guoyuan, Chen, Rongsheng, Kwok, Hoi-Sing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6116247/ https://www.ncbi.nlm.nih.gov/pubmed/30081483 http://dx.doi.org/10.3390/nano8080590

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