Perfluoropolyether (PFPE) Intermediate Molds for High-Resolution Thermal Nanoimprint Lithography

Among soft lithography techniques, Thermal Nanoimprint Lithography (NIL) is a high-throughput and low-cost process that can be applied to a broad range of thermoplastic materials. By simply applying the appropriate pressure and temperature combination, it is possible to transfer a pattern from a mol...

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Detalles Bibliográficos
Autores principales: Masciullo, Cecilia, Sonato, Agnese, Romanato, Filippo, Cecchini, Marco
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6116295/
https://www.ncbi.nlm.nih.gov/pubmed/30103377
http://dx.doi.org/10.3390/nano8080609

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6116295/
https://www.ncbi.nlm.nih.gov/pubmed/30103377
http://dx.doi.org/10.3390/nano8080609

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