Molecular dynamics simulation of aluminum nitride deposition: temperature and N : Al ratio effects

Heteroepitaxial growth of aluminum nitride (AIN) has been explored by experiments, but the corresponding growth mechanism is still unrevealed. Here, we use molecular dynamics simulations to study effects of temperature and N : Al flux ratio on deposited AlN. When the temperature increases from 1000...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhang, Libin, Yan, Han, Zhu, Guo, Liu, Sheng, Gan, Zhiyin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society 2018
Materias:
Physics
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6124064/
https://www.ncbi.nlm.nih.gov/pubmed/30225060
http://dx.doi.org/10.1098/rsos.180629

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6124064/
https://www.ncbi.nlm.nih.gov/pubmed/30225060
http://dx.doi.org/10.1098/rsos.180629

Ejemplares similares