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High-performance flexible metal-on-silicon thermocouple

We have demonstrated metal-on-silicon thermocouples with a noticeably high Seebeck coefficient and an excellent temperature-sensing resolution. Fabrication of the thermocouples involved only simple photolithography and metal-liftoff procedures on a silicon substrate. The experimentally measured Seeb...

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Detalles Bibliográficos
Autores principales: Assumpcao, Daniel, Kumar, Shailabh, Narasimhan, Vinayak, Lee, Jongho, Choo, Hyuck
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6137040/
https://www.ncbi.nlm.nih.gov/pubmed/30214053
http://dx.doi.org/10.1038/s41598-018-32169-9