Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

The outstanding material properties of single crystal diamond have been at the origin of the long-standing interest in its exploitation for engineering of high-performance micro- and nanosystems. In particular, the extreme mechanical hardness, the highest elastic modulus of any bulk material, low de...

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Detalles Bibliográficos
Autores principales: Toros, Adrien, Kiss, Marcell, Graziosi, Teodoro, Sattari, Hamed, Gallo, Pascal, Quack, Niels
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6161503/
https://www.ncbi.nlm.nih.gov/pubmed/31057900
http://dx.doi.org/10.1038/s41378-018-0014-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6161503/
https://www.ncbi.nlm.nih.gov/pubmed/31057900
http://dx.doi.org/10.1038/s41378-018-0014-5

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