Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films

In this paper, molybdenum (Mo) thin films are deposited on soda-lime glass (SLG) substrates by direct current magnetron sputtering and heated in three different modes at different temperatures, including substrate heating, annealing treatment, and both substrate heating and annealing treatment. The...

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Detalles Bibliográficos
Autores principales: Zhao, Haili, Xie, Jingpei, Mao, Aixia, Wang, Aiqin, Chen, Yanfang, Liang, Tingting, Ma, Douqin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6163281/
https://www.ncbi.nlm.nih.gov/pubmed/30200622
http://dx.doi.org/10.3390/ma11091634

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6163281/
https://www.ncbi.nlm.nih.gov/pubmed/30200622
http://dx.doi.org/10.3390/ma11091634

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