Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator geometries designed for ultrasensitive detection operating...

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Detalles Bibliográficos
Autores principales: Perelló-Roig, Rafel, Verd, Jaume, Bota, Sebastià, Segura, Jaume
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6164022/
https://www.ncbi.nlm.nih.gov/pubmed/30223610
http://dx.doi.org/10.3390/s18093124

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6164022/
https://www.ncbi.nlm.nih.gov/pubmed/30223610
http://dx.doi.org/10.3390/s18093124

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