Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Low-frequency vibration is a harmful factor that affects the accuracy of micro/nano-measuring machines. Low-frequency vibration cannot be completely eliminated by passive control methods, such as the use of air-floating platforms. Therefore, low-frequency vibrations must be measured before being act...

Descripción completa

Detalles Bibliográficos
Autores principales: Li, Rui-Jun, Lei, Ying-Jun, Chang, Zhen-Xin, Zhang, Lian-Sheng, Fan, Kuang-Chao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6165265/
https://www.ncbi.nlm.nih.gov/pubmed/30200509
http://dx.doi.org/10.3390/s18092910

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6165265/
https://www.ncbi.nlm.nih.gov/pubmed/30200509
http://dx.doi.org/10.3390/s18092910

Ejemplares similares