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Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement
Low-frequency vibration is a harmful factor that affects the accuracy of micro/nano-measuring machines. Low-frequency vibration cannot be completely eliminated by passive control methods, such as the use of air-floating platforms. Therefore, low-frequency vibrations must be measured before being act...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6165265/ https://www.ncbi.nlm.nih.gov/pubmed/30200509 http://dx.doi.org/10.3390/s18092910 |