Enhanced Electrical Properties of Atomic Layer Deposited La(x)Al(y)O Thin Films with Stress Relieved Preoxide Pretreatment

The impact of stress relieved preoxide (SRPO) interface engineering on the physical and electrical properties of La(x)Al(y)O films was investigated. It was proved that the SRPO pretreatment has little influence on the surface morphology of La(x)Al(y)O films and the chemical bond composition of La(x)...

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Detalles Bibliográficos
Autores principales: Wang, Xing, Liu, Hongxia, Zhao, Lu, Wang, Yongte
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6165461/
https://www.ncbi.nlm.nih.gov/pubmed/30177672
http://dx.doi.org/10.3390/ma11091601

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6165461/
https://www.ncbi.nlm.nih.gov/pubmed/30177672
http://dx.doi.org/10.3390/ma11091601

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