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Enhanced Electrical Properties of Atomic Layer Deposited La(x)Al(y)O Thin Films with Stress Relieved Preoxide Pretreatment
The impact of stress relieved preoxide (SRPO) interface engineering on the physical and electrical properties of La(x)Al(y)O films was investigated. It was proved that the SRPO pretreatment has little influence on the surface morphology of La(x)Al(y)O films and the chemical bond composition of La(x)...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6165461/ https://www.ncbi.nlm.nih.gov/pubmed/30177672 http://dx.doi.org/10.3390/ma11091601 |