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Graphene-Based Nanoscale Vacuum Channel Transistor

We report the fabrication and electrical performance of nanoscale vacuum channel transistor (NVCT) based on graphene. Ninety-nanometer-width vacuum nano-channel could be precisely fabricated with standard electron beam lithography process. The optimization and treatment of surface damage and adhesiv...

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Detalles Bibliográficos
Autores principales: Xu, Ji, Gu, Zhuyan, Yang, Wenxin, Wang, Qilong, Zhang, Xiaobing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6172161/
https://www.ncbi.nlm.nih.gov/pubmed/30288627
http://dx.doi.org/10.1186/s11671-018-2736-6