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Graphene-Based Nanoscale Vacuum Channel Transistor

We report the fabrication and electrical performance of nanoscale vacuum channel transistor (NVCT) based on graphene. Ninety-nanometer-width vacuum nano-channel could be precisely fabricated with standard electron beam lithography process. The optimization and treatment of surface damage and adhesiv...

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Detalles Bibliográficos
Autores principales:	Xu, Ji, Gu, Zhuyan, Yang, Wenxin, Wang, Qilong, Zhang, Xiaobing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2018
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6172161/ https://www.ncbi.nlm.nih.gov/pubmed/30288627 http://dx.doi.org/10.1186/s11671-018-2736-6

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