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Nanocomposite-Based Microstructured Piezoresistive Pressure Sensors for Low-Pressure Measurement Range
Piezoresistive pressure sensors capable of detecting ranges of low compressive stresses have been successfully fabricated and characterised. The 5.5 × 5 × 1.6 mm(3) sensors consist of a planar aluminium top electrode and a microstructured bottom electrode containing a two-by-two array of truncated p...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187228/ https://www.ncbi.nlm.nih.gov/pubmed/30393319 http://dx.doi.org/10.3390/mi9020043 |