DC-25 GHz and Low-Loss MEMS Thermoelectric Power Sensors with Floating Thermal Slug and Reliable Back Cavity Based on GaAs MMIC Technology

Wideband and low-loss microwave power measurements are becoming increasingly important for microwave communication and radar systems. To achieve such a power measurement, this paper presents the design and measurement of wideband DC-25 GHz and low-loss MEMS thermoelectric power sensors with a floati...

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Detalles Bibliográficos
Autores principales: Zhang, Zhiqiang, Ma, Yao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187267/
https://www.ncbi.nlm.nih.gov/pubmed/30424088
http://dx.doi.org/10.3390/mi9040154

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187267/
https://www.ncbi.nlm.nih.gov/pubmed/30424088
http://dx.doi.org/10.3390/mi9040154

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