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DC-25 GHz and Low-Loss MEMS Thermoelectric Power Sensors with Floating Thermal Slug and Reliable Back Cavity Based on GaAs MMIC Technology
Wideband and low-loss microwave power measurements are becoming increasingly important for microwave communication and radar systems. To achieve such a power measurement, this paper presents the design and measurement of wideband DC-25 GHz and low-loss MEMS thermoelectric power sensors with a floati...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187267/ https://www.ncbi.nlm.nih.gov/pubmed/30424088 http://dx.doi.org/10.3390/mi9040154 |