Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing

The focus of this study is on the manufacturing of micro air bearings (MABs) using silica film assisted processing. Structure of the three-layer micro air bearing is described in detail and the salient process flow of etching and bonding is illustrated. The main manufacturing challenges and the meth...

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Detalles Bibliográficos
Autores principales: Yu, Mingxing, Lv, Pin, Xu, Tiantong, Tan, Xiao, Li, Haiwang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187313/
https://www.ncbi.nlm.nih.gov/pubmed/30424099
http://dx.doi.org/10.3390/mi9040166

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187313/
https://www.ncbi.nlm.nih.gov/pubmed/30424099
http://dx.doi.org/10.3390/mi9040166

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