Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors

Polymer Micro ElectroMechanical Systems (MEMS) have the potential to constitute a powerful alternative to silicon-based MEMS devices for sensing applications. Although the use of commercial photoresists as structural material in polymer MEMS has been widely reported, the integration of functional po...

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Detalles Bibliográficos
Autores principales: Thuau, Damien, Ducrot, Pierre-Henri, Poulin, Philippe, Dufour, Isabelle, Ayela, Cédric
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187334/
https://www.ncbi.nlm.nih.gov/pubmed/30424130
http://dx.doi.org/10.3390/mi9050197

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187334/
https://www.ncbi.nlm.nih.gov/pubmed/30424130
http://dx.doi.org/10.3390/mi9050197

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