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Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors
Polymer Micro ElectroMechanical Systems (MEMS) have the potential to constitute a powerful alternative to silicon-based MEMS devices for sensing applications. Although the use of commercial photoresists as structural material in polymer MEMS has been widely reported, the integration of functional po...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187334/ https://www.ncbi.nlm.nih.gov/pubmed/30424130 http://dx.doi.org/10.3390/mi9050197 |