FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

This paper presents a flame retardant 4 (FR4)-based electromagnetic scanning micromirror, which aims to overcome the limitations of conventional microelectromechanical systems (MEMS) micromirrors for the large-aperture and low-frequency scanning applications. This micromirror is fabricated through a...

Descripción completa

Detalles Bibliográficos
Autores principales: Lei, Hongjie, Wen, Quan, Yu, Fan, Zhou, Ying, Wen, Zhiyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187362/
https://www.ncbi.nlm.nih.gov/pubmed/30424147
http://dx.doi.org/10.3390/mi9050214

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187362/
https://www.ncbi.nlm.nih.gov/pubmed/30424147
http://dx.doi.org/10.3390/mi9050214

Ejemplares similares