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FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

This paper presents a flame retardant 4 (FR4)-based electromagnetic scanning micromirror, which aims to overcome the limitations of conventional microelectromechanical systems (MEMS) micromirrors for the large-aperture and low-frequency scanning applications. This micromirror is fabricated through a...

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Detalles Bibliográficos
Autores principales:	Lei, Hongjie, Wen, Quan, Yu, Fan, Zhou, Ying, Wen, Zhiyu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187362/ https://www.ncbi.nlm.nih.gov/pubmed/30424147 http://dx.doi.org/10.3390/mi9050214

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