Acceleration Sensitivity in Bulk-Extensional Mode, Silicon-Based MEMS Oscillators

Acceleration sensitivity in silicon bulk-extensional mode oscillators is studied in this work, and a correlation between the resonator alignment to different crystalline planes of silicon and the observed acceleration sensitivity is established. It is shown that the oscillator sensitivity to the app...

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Detalles Bibliográficos
Autores principales: Khazaeili, Beheshte, Gonzales, Jonathan, Abdolvand, Reza
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187388/
https://www.ncbi.nlm.nih.gov/pubmed/30424166
http://dx.doi.org/10.3390/mi9050233

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187388/
https://www.ncbi.nlm.nih.gov/pubmed/30424166
http://dx.doi.org/10.3390/mi9050233

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