Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration

In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of deflecting beyond the electrode gap distance, enabling large generated forces...

Descripción completa

Detalles Bibliográficos
Autores principales: Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187451/
https://www.ncbi.nlm.nih.gov/pubmed/30424123
http://dx.doi.org/10.3390/mi9040190

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187451/
https://www.ncbi.nlm.nih.gov/pubmed/30424123
http://dx.doi.org/10.3390/mi9040190

Ejemplares similares