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Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of deflecting beyond the electrode gap distance, enabling large generated forces...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187451/ https://www.ncbi.nlm.nih.gov/pubmed/30424123 http://dx.doi.org/10.3390/mi9040190 |
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author | Uhlig, Sebastian Gaudet, Matthieu Langa, Sergiu Schimmanz, Klaus Conrad, Holger Kaiser, Bert Schenk, Harald |
author_facet | Uhlig, Sebastian Gaudet, Matthieu Langa, Sergiu Schimmanz, Klaus Conrad, Holger Kaiser, Bert Schenk, Harald |
author_sort | Uhlig, Sebastian |
collection | PubMed |
description | In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of deflecting beyond the electrode gap distance, enabling large generated forces and deflections. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial and parallel arrangement of equally working pumping base units. Two selected, medium specific micropump test structure devices for pumping air and isopropanol were designed and investigated. An analytical approach of the driving unit is presented and two-way Fluid-Structure Interaction (FSI) simulations of the micropump were carried out to determine the dynamic behavior. The simulation showed that the test structure device designed for air expected to overcome a total differential pressure of 130 kPa and deliver a flow rate of 0.11 sccm at a 265 Hz driving frequency. The isopropanol design is expected to generate 210 kPa and pump 0.01 sccm at 21 Hz. The device is monolithically fabricated by CMOS-compatible bulk micromachining processes under the use of standard materials only, such as crystalline silicon, silicon dioxide and alumina. |
format | Online Article Text |
id | pubmed-6187451 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2018 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-61874512018-11-01 Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration Uhlig, Sebastian Gaudet, Matthieu Langa, Sergiu Schimmanz, Klaus Conrad, Holger Kaiser, Bert Schenk, Harald Micromachines (Basel) Article In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of deflecting beyond the electrode gap distance, enabling large generated forces and deflections. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial and parallel arrangement of equally working pumping base units. Two selected, medium specific micropump test structure devices for pumping air and isopropanol were designed and investigated. An analytical approach of the driving unit is presented and two-way Fluid-Structure Interaction (FSI) simulations of the micropump were carried out to determine the dynamic behavior. The simulation showed that the test structure device designed for air expected to overcome a total differential pressure of 130 kPa and deliver a flow rate of 0.11 sccm at a 265 Hz driving frequency. The isopropanol design is expected to generate 210 kPa and pump 0.01 sccm at 21 Hz. The device is monolithically fabricated by CMOS-compatible bulk micromachining processes under the use of standard materials only, such as crystalline silicon, silicon dioxide and alumina. MDPI 2018-04-18 /pmc/articles/PMC6187451/ /pubmed/30424123 http://dx.doi.org/10.3390/mi9040190 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Uhlig, Sebastian Gaudet, Matthieu Langa, Sergiu Schimmanz, Klaus Conrad, Holger Kaiser, Bert Schenk, Harald Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration |
title | Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration |
title_full | Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration |
title_fullStr | Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration |
title_full_unstemmed | Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration |
title_short | Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration |
title_sort | electrostatically driven in-plane silicon micropump for modular configuration |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187451/ https://www.ncbi.nlm.nih.gov/pubmed/30424123 http://dx.doi.org/10.3390/mi9040190 |
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