A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators

Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing for mass production. Among the different test methods, frequency domain analysis is one of the easiest and fastest. This paper presents the measurement uncertainties in electrostatically actuated MEMS...

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Detalles Bibliográficos
Autores principales: Iqbal, Faisal, Lee, Byeungleul
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187468/
https://www.ncbi.nlm.nih.gov/pubmed/30424106
http://dx.doi.org/10.3390/mi9040173

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187468/
https://www.ncbi.nlm.nih.gov/pubmed/30424106
http://dx.doi.org/10.3390/mi9040173

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