Improving the Electrical Contact Performance for Amorphous Wire Magnetic Sensor by Employing MEMS Process

This paper presents a novel fabrication method for amorphous alloy wire giant magneto-impedance (GMI) magnetic sensor based on micro electro mechanical systems (MEMS) technology. In this process, negative SU-8 thick photoresist was proposed as the solder mask due to its excellent properties, such as...

Descripción completa

Detalles Bibliográficos
Autores principales: Chen, Yulong, Li, Jianhua, Chen, Jianwen, Xu, Lixin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187486/
https://www.ncbi.nlm.nih.gov/pubmed/30424232
http://dx.doi.org/10.3390/mi9060299

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187486/
https://www.ncbi.nlm.nih.gov/pubmed/30424232
http://dx.doi.org/10.3390/mi9060299

Ejemplares similares