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Improving the Electrical Contact Performance for Amorphous Wire Magnetic Sensor by Employing MEMS Process
This paper presents a novel fabrication method for amorphous alloy wire giant magneto-impedance (GMI) magnetic sensor based on micro electro mechanical systems (MEMS) technology. In this process, negative SU-8 thick photoresist was proposed as the solder mask due to its excellent properties, such as...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187486/ https://www.ncbi.nlm.nih.gov/pubmed/30424232 http://dx.doi.org/10.3390/mi9060299 |