Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films

An acceleration sensor based on piezoelectric thin films is proposed in this paper, which comprises the elastic element of a silicon cantilever beam and a piezoelectric structure with Li-doped ZnO piezoelectric thin films. The Li-doped ZnO piezoelectric thin films were prepared on SiO(2)/Si by radio...

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Detalles Bibliográficos
Autores principales: Li, Sen, Zhao, Xiaofeng, Bai, Yinan, Li, Yi, Ai, Chunpeng, Wen, Dianzhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187495/
https://www.ncbi.nlm.nih.gov/pubmed/30424111
http://dx.doi.org/10.3390/mi9040178

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187495/
https://www.ncbi.nlm.nih.gov/pubmed/30424111
http://dx.doi.org/10.3390/mi9040178

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