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Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance †

Ultra-high pressure measurement has significant applications in various fields such as high pressure synthesis of new materials and ultra-high pressure vessel monitoring. This paper proposes a novel ultra-high pressure sensor combining a truncated-cone structure and a silicon-on-insulator (SOI) piez...

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Detalles Bibliográficos
Autores principales: Zhang, Guo-Dong, Zhao, Yu-Long, Zhao, Yun, Wang, Xin-Chen, Wei, Xue-Yong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187505/
https://www.ncbi.nlm.nih.gov/pubmed/30393281
http://dx.doi.org/10.3390/mi9010005