Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor

This paper presents an EMD (empirical mode decomposition)-based extraction approach to decouple the electric field fringe component impacts on the nonlinearity errors of a micro encoder-like capacitive displacement sensor. A calculated capacitance model built under Maxwell’s equations against the im...

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Detalles Bibliográficos
Autores principales: Yu, Jian-Ping, Du, Hui-Lin, Li, Xin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187548/
https://www.ncbi.nlm.nih.gov/pubmed/30424144
http://dx.doi.org/10.3390/mi9050211

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187548/
https://www.ncbi.nlm.nih.gov/pubmed/30424144
http://dx.doi.org/10.3390/mi9050211

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