High-Performance MIM Capacitors for a Secondary Power Supply Application

Microstructure is important to the development of energy devices with high performance. In this work, a three-dimensional Si-based metal-insulator-metal (MIM) capacitor has been reported, which is fabricated by microelectromechanical systems (MEMS) technology. Area enlargement is achieved by forming...

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Detalles Bibliográficos
Autores principales: Mu, Jiliang, Chou, Xiujian, Ma, Zongmin, He, Jian, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187552/
https://www.ncbi.nlm.nih.gov/pubmed/30393345
http://dx.doi.org/10.3390/mi9020069

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187552/
https://www.ncbi.nlm.nih.gov/pubmed/30393345
http://dx.doi.org/10.3390/mi9020069

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