Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness

For the MEMS capacitive accelerometer, parasitic capacitance is a serious problem. Its mismatch will deteriorate the performance of accelerometer. Obtaining the mismatch of the parasitic capacitance precisely is helpful for improving the performance of bias and scale. Currently, the method of measur...

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Detalles Bibliográficos
Autores principales: Dong, Xianshan, Yang, Shaohua, Zhu, Junhua, En, Yunfei, Huang, Qinwen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187560/
https://www.ncbi.nlm.nih.gov/pubmed/30424063
http://dx.doi.org/10.3390/mi9030128

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187560/
https://www.ncbi.nlm.nih.gov/pubmed/30424063
http://dx.doi.org/10.3390/mi9030128

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