Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are dedu...

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Detalles Bibliográficos
Autores principales: Yang, Jian, Si, Chaowei, Yang, Fan, Han, Guowei, Ning, Jin, Yang, Fuhua, Wang, Xiaodong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187564/
https://www.ncbi.nlm.nih.gov/pubmed/30393357
http://dx.doi.org/10.3390/mi9020081

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187564/
https://www.ncbi.nlm.nih.gov/pubmed/30393357
http://dx.doi.org/10.3390/mi9020081

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