Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are dedu...

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Detalles Bibliográficos
Autores principales: Yang, Jian, Si, Chaowei, Yang, Fan, Han, Guowei, Ning, Jin, Yang, Fuhua, Wang, Xiaodong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187564/
https://www.ncbi.nlm.nih.gov/pubmed/30393357
http://dx.doi.org/10.3390/mi9020081
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author Yang, Jian
Si, Chaowei
Yang, Fan
Han, Guowei
Ning, Jin
Yang, Fuhua
Wang, Xiaodong
author_facet Yang, Jian
Si, Chaowei
Yang, Fan
Han, Guowei
Ning, Jin
Yang, Fuhua
Wang, Xiaodong
author_sort Yang, Jian
collection PubMed
description A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are deduced, which based on the piezoelectric equation and elastic vibration equation. In this work, a cantilever gyroscope has been simulated and optimized by COMSOL Multiphysics 5.2a. The drive mode frequency is 87.422 kHz, and the sense mode frequency is 87.414 kHz. The theoretical sensitivity of this gyroscope is 0.145 pm/◦/s. This gyroscope has a small size and simple structure. It will be a better choice for the consumer electronics.
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spelling pubmed-61875642018-11-01 Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope Yang, Jian Si, Chaowei Yang, Fan Han, Guowei Ning, Jin Yang, Fuhua Wang, Xiaodong Micromachines (Basel) Article A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are deduced, which based on the piezoelectric equation and elastic vibration equation. In this work, a cantilever gyroscope has been simulated and optimized by COMSOL Multiphysics 5.2a. The drive mode frequency is 87.422 kHz, and the sense mode frequency is 87.414 kHz. The theoretical sensitivity of this gyroscope is 0.145 pm/◦/s. This gyroscope has a small size and simple structure. It will be a better choice for the consumer electronics. MDPI 2018-02-15 /pmc/articles/PMC6187564/ /pubmed/30393357 http://dx.doi.org/10.3390/mi9020081 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yang, Jian
Si, Chaowei
Yang, Fan
Han, Guowei
Ning, Jin
Yang, Fuhua
Wang, Xiaodong
Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
title Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
title_full Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
title_fullStr Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
title_full_unstemmed Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
title_short Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
title_sort design and simulation of a novel piezoelectric aln-si cantilever gyroscope
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187564/
https://www.ncbi.nlm.nih.gov/pubmed/30393357
http://dx.doi.org/10.3390/mi9020081
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