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Glancing Angle Deposition Effect on Structure and Light-Induced Wettability of RF-Sputtered TiO(2) Thin Films
Crystalline TiO(2) films were prepared on unheated glass substrates by radio frequency (RF) reactive magnetron sputtering at normal angle of incidence (a = 0°) and at glancing angle (a = 87°). The effect of the glancing angle on the structure, microstructure, and wetting properties of the films was...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187567/ https://www.ncbi.nlm.nih.gov/pubmed/30424322 http://dx.doi.org/10.3390/mi9080389 |