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The Application of Chemical Foaming Method in the Fabrication of Micro Glass Hemisphere Resonator

Many researchers have studied the miniaturization of the hemisphere resonator gyroscope for decades. The hemisphere resonator (HSR), as the core component, has a size that has been reduced to the submillimeter level. We developed a method of batch production of micro-hemisphere shell resonators base...

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Detalles Bibliográficos
Autores principales: Xie, Jianbing, Chen, Lei, Xie, Hui, Zhou, Jinqiu, Liu, Guangcheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187607/
https://www.ncbi.nlm.nih.gov/pubmed/30393318
http://dx.doi.org/10.3390/mi9020042