Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems

Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier pr...

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Detalles Bibliográficos
Autores principales: Ortigoza-Diaz, Jessica, Scholten, Kee, Larson, Christopher, Cobo, Angelica, Hudson, Trevor, Yoo, James, Baldwin, Alex, Weltman Hirschberg, Ahuva, Meng, Ellis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187609/
https://www.ncbi.nlm.nih.gov/pubmed/30424355
http://dx.doi.org/10.3390/mi9090422

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187609/
https://www.ncbi.nlm.nih.gov/pubmed/30424355
http://dx.doi.org/10.3390/mi9090422

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