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Hysteresis Compensation and Sliding Mode Control with Perturbation Estimation for Piezoelectric Actuators
Based on the background of atomic force microscope (AFM) driven by piezoelectric actuators (PEAs), this paper proposes a sliding mode control coupled with an inverse Bouc–Wen (BW) hysteresis compensator to improve the positioning performance of PEAs. The intrinsic hysteresis and creep characteristic...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187614/ https://www.ncbi.nlm.nih.gov/pubmed/30424174 http://dx.doi.org/10.3390/mi9050241 |