Fundamental Study for a Graphite-Based Microelectromechanical System

We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microshee...

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Detalles Bibliográficos
Autores principales: Sone, Junji, Murakami, Mutsuaki, Tatami, Atsushi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187653/
https://www.ncbi.nlm.nih.gov/pubmed/30393340
http://dx.doi.org/10.3390/mi9020064

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187653/
https://www.ncbi.nlm.nih.gov/pubmed/30393340
http://dx.doi.org/10.3390/mi9020064

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