Fundamental Study for a Graphite-Based Microelectromechanical System

We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microshee...

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Detalles Bibliográficos
Autores principales: Sone, Junji, Murakami, Mutsuaki, Tatami, Atsushi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187653/
https://www.ncbi.nlm.nih.gov/pubmed/30393340
http://dx.doi.org/10.3390/mi9020064
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author Sone, Junji
Murakami, Mutsuaki
Tatami, Atsushi
author_facet Sone, Junji
Murakami, Mutsuaki
Tatami, Atsushi
author_sort Sone, Junji
collection PubMed
description We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
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spelling pubmed-61876532018-11-01 Fundamental Study for a Graphite-Based Microelectromechanical System Sone, Junji Murakami, Mutsuaki Tatami, Atsushi Micromachines (Basel) Article We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure. MDPI 2018-02-02 /pmc/articles/PMC6187653/ /pubmed/30393340 http://dx.doi.org/10.3390/mi9020064 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Sone, Junji
Murakami, Mutsuaki
Tatami, Atsushi
Fundamental Study for a Graphite-Based Microelectromechanical System
title Fundamental Study for a Graphite-Based Microelectromechanical System
title_full Fundamental Study for a Graphite-Based Microelectromechanical System
title_fullStr Fundamental Study for a Graphite-Based Microelectromechanical System
title_full_unstemmed Fundamental Study for a Graphite-Based Microelectromechanical System
title_short Fundamental Study for a Graphite-Based Microelectromechanical System
title_sort fundamental study for a graphite-based microelectromechanical system
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187653/
https://www.ncbi.nlm.nih.gov/pubmed/30393340
http://dx.doi.org/10.3390/mi9020064
work_keys_str_mv AT sonejunji fundamentalstudyforagraphitebasedmicroelectromechanicalsystem
AT murakamimutsuaki fundamentalstudyforagraphitebasedmicroelectromechanicalsystem
AT tatamiatsushi fundamentalstudyforagraphitebasedmicroelectromechanicalsystem

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