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Fundamental Study for a Graphite-Based Microelectromechanical System

We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microshee...

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Detalles Bibliográficos
Autores principales:	Sone, Junji, Murakami, Mutsuaki, Tatami, Atsushi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187653/ https://www.ncbi.nlm.nih.gov/pubmed/30393340 http://dx.doi.org/10.3390/mi9020064

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