Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System

To meet the radiosonde requirement of high sensitivity and linearity, this study designs and implements a monolithically integrated array-type piezoresistive intelligent pressure sensor system which is made up of two groups of four pressure sensors with the pressure range of 0–50 kPa and 0–100 kPa r...

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Detalles Bibliográficos
Autores principales: Zhang, Jiahong, Chen, Jianxiang, Li, Min, Ge, Yixian, Wang, Tingting, Shan, Peng, Mao, Xiaoli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187660/
https://www.ncbi.nlm.nih.gov/pubmed/30424038
http://dx.doi.org/10.3390/mi9030104

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187660/
https://www.ncbi.nlm.nih.gov/pubmed/30424038
http://dx.doi.org/10.3390/mi9030104

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