Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers

In this paper, two versions of capacitive accelerometers based on low-temperature co-fired ceramic (LTCC) technology are developed, different with respect to the detection technique, as well as the mechanical structure. Fabrication of the key structure, a heavy proof mass with thin beams embedded in...

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Detalles Bibliográficos
Autores principales: Liu, Huan, Fang, Runiu, Miao, Min, Zhang, Yichuan, Yan, Yingzhan, Tang, Xiaoping, Lu, Huixiang, Jin, Yufeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187678/
https://www.ncbi.nlm.nih.gov/pubmed/30424054
http://dx.doi.org/10.3390/mi9030120

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187678/
https://www.ncbi.nlm.nih.gov/pubmed/30424054
http://dx.doi.org/10.3390/mi9030120

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