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Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers
In this paper, two versions of capacitive accelerometers based on low-temperature co-fired ceramic (LTCC) technology are developed, different with respect to the detection technique, as well as the mechanical structure. Fabrication of the key structure, a heavy proof mass with thin beams embedded in...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187678/ https://www.ncbi.nlm.nih.gov/pubmed/30424054 http://dx.doi.org/10.3390/mi9030120 |