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A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual re...

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Detalles Bibliográficos
Autores principales: Vyas, Agin, Staaf, Henrik, Rusu, Cristina, Ebefors, Thorbjörn, Liljeholm, Jessica, Smith, Anderson D., Lundgren, Per, Enoksson, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187692/
https://www.ncbi.nlm.nih.gov/pubmed/30424185
http://dx.doi.org/10.3390/mi9050252