Cargando…

Mechanical Response of MEMS Inductor with Auxiliary Pillar under High-g Shock

Micro-electromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance, but poor mechanical properties. To improve their reliability, auxiliary pillars have been used. However, few studies have been carried out on the response of a suspended inductor with auxiliary...

Descripción completa

Detalles Bibliográficos
Autores principales: Xu, Lixin, Li, Yiyuan, Li, Jianhua, Lu, Chongying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187739/
https://www.ncbi.nlm.nih.gov/pubmed/30424109
http://dx.doi.org/10.3390/mi9040176